摘要
Nanocrystalline zirconia particles with a diameter of about 4 nm were obtained by microwave-assisted decomposition of basic zirconium acetate in ethoxyethanol. The reaction yields optically transparent and stable dispersions, which can ideally be employed for the manufacture of dielectric thin films by spin-coating followed by a subsequent annealing step. The influence of the processing conditions on the electronic performance of an electrical capacitor device built from this nanomaterial was studied. Electron paramagnetic resonance spectroscopic studies exclude the presence of point defects within the zirconia bulk; however, they reveal the presence of surface-related paramagnetic species.
- 出版日期2014-11