A 0.6 THz quasi-optical detector based on a room microbolometer

作者：Kang L^*; Tu X C; Lu X Y; Liu X H; Chen J; Wu P H

来源：36th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2011, 2011-10-02 to 2011-10-07.

DOI：10.1109/irmmw-THz.2011.6104990

• Folded dipole antenna
• High resistance
• Microbolometer
• Quasi-optical
• Room temperature
• Si substrates
• THz detectors
• Wide bandwidth

This paper reports the performance of a THz detector with a wide bandwidth based on Nb5N6microbolometer operated at room temperature. This microbolometer integrated with a planar folded dipole antenna is fabricated on the high resistance Si substrates. The best attainable electrical responsibility of Nb5N6microbolometer is about -600 V/W. A quasi-optical type detector based on this Nb5N 6microbolometer is constructed, and the result shows a good performance at a range of 0.6THz to 0.7THz.

• 出版日期2011
• 单位南京大学