Scanning and Tunable Micro-Optics for Endoscopic Optical Coherence Tomography

作者：Aljasem Khaled^*; Froehly Luc; Seifert Andreas; Zappe Hans

来源：Journal of Microelectromechanical Systems, 2011, 20(6): 1462-1472.

DOI：10.1109/JMEMS.2011.2167656

• Endoscopic imaging
• endoscopic optical coherence tomography
• microlenses
• micromirrors
• tunable microoptics

The design, fabrication, and integration of microoptical components for beam focus and steering are demonstrated in an endoscopic optical coherence tomography (OCT) system. The relevant components, a membrane-based microfluidic tunable microlens and an electrostatic 2-D scanning micromirror, are fabricated using silicon and polymer-based microelectromechanical system technologies. All components are assembled inside a 4.5 mu m diameter probe. The design of the optical system, including substantiation of the need for focal length tunability, is presented, along with performance data of an OCT system using these components. A lateral resolution of about 13 mu is achieved, an improvement over fixed-focal length probes. Due to the miniaturization of the measurement head achievable using this optical microsystem, use in conventional endoscopes is possible.

• 出版日期2011-12