Mechanical Properties of Silicon Nanowires

作者：Sohn Young Soo; Park Jinsung; Yoon Gwonchan; Song Jiseok; Jee Sang Won; Lee Jung Ho; Na Sungsoo; Kwon Taeyun^*; Eom Kilho

来源：Nanoscale Research Letters, 2010, 5(1): 211-216.

DOI：10.1007/s11671-009-9467-7

• Silicon nanowire
• Elastic modulus
• Nanoindentation
• Atomic force microscope

Nanowires have been taken much attention as a nanoscale building block, which can perform the excellent mechanical function as an electromechanical device. Here, we have performed atomic force microscope (AFM)-based nanoindentation experiments of silicon nanowires in order to investigate the mechanical properties of silicon nanowires. It is shown that stiffness of nanowires is well described by Hertz theory and that elastic modulus of silicon nanowires with various diameters from similar to 100 to similar to 600 nm is close to that of bulk silicon. This implies that the elastic modulus of silicon nanowires is independent of their diameters if the diameter is larger than 100 nm. This supports that finite size effect (due to surface effect) does not play a role on elastic behavior of silicon nanowires with diameter of > 100 nm.

• 出版日期2010-1