科研之友
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摘要
We propose and analyse a novel optical pressure sensor based on series-coupled double microring resonators (SDMRRs) on a simple beam. The pressure applied on the sensor is measured through the change of the optical transmission spectrum at the output port. The optical transmission performances of the SDMRRs have been analysed and compared with the single and paralleled-coupled structures by the method of finite element analysis and numerical simulation. The simulation results showed that the stress sensitivity is 0.0225 kPa(-1) and linear measurement range of the sensor is 30 kPa. Furthermore, the influence of the amplitude transmission coefficient, half round phase shift and microring radius on the sensitivity have been investigated to optimize the sensor performance. This proposed sensor can be used for the smaller pressure detection in automotive, aerospace, oil/logging equipment and other harsh environmental application.
- 出版日期2019-2-6
- 单位中国地质大学（北京）
