Discharge Operation Mode Manipulation of Radio Frequency Atmospheric Pressure Glow Discharges in Argon

作者：Qian, Y. J.; Ding, K.; Song, S. T.; Guo, Y.; Zhang, J.; Shi, J. J.^*

来源：Contributions to Plasma Physics, 2012, 52(4): 289-294.

DOI：10.1002/ctpp.201100109

• Atmospheric pressure glow discharge
• operation mode
• numerical simulation

Stable operation of radio frequency atmospheric glow discharges is widely desired by most processing applications for their conveniency and feasibility, many of which have been addressed with the noble gas of helium and low discharge current density in stable operation regime of alpha mode. Here, the operation mode manipulation of rf atmospheric pressure glow discharge in argon is investigated using a one-dimensional self-consistent modeling approach. Stable operation regime of alpha mode is found to expand with rinsing excitation frequency and reducing discharge gap distance. The sheath characteristics in terms of sheath voltage and sheath thickness are given to explain the of alpha-gamma mode transition. Furthermore, stable operation of discharge in gamma mode is proposed to be achieved by introducing dielectric barriers, which is indicated by monotonously growing of applied voltage with discharge current density.

• 出版日期2012-5
• 单位东华大学