科研之友
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摘要
Magnetic [FeNi (170 nm)/Ti (6 nm)](3)/Cu (L-Cu = 250 or 500 nm)/[Ti (6 nm)/FeNi (170 nm)](3) multilayers were designed with focus on high frequency applications. They were deposited onto glass or a microfluidic system compatible flexible Ciclo Olefin Copolymer substrate and comparatively tested. A maximum sensitivity for the total impedance of 110%/Oe was obtained for a driving current frequency of 30 MHz for [FeNi/Ti](3)/Cu (L-Cu = 500 nm)/Ti/FeNi](3) multilayers deposited onto a glass substrate and 45%/Oe for a driving current frequency of 65 MHz for the same multilayers deposited onto the flexible polymer substrate, a very promising result for applications. The possibility of using flexible substrate/[FeNi/Ti](3)/Cu/[Ti/FeNi](3) multilayers as MI pressure-sensitive elements was also demonstrated.
- 出版日期2012-9
