Size Control of Crystalline Germanium Nanoparticles Using Inductively Coupled Nonthermal Plasma

作者：Oh Kyoung Suk; Yang Ki Won; Kim Hong Tak; Lee Heon; Lee Jeong Chul^*; Sohn Young Soo

来源：Journal of Nanoelectronics and Optoelectronics, 2013, 8(6): 571-574.

DOI：10.1166/jno.2013.1533

• Germanium
• Nanoparticle
• Crystal
• Nonthermal Plasma

Inductively coupled nonthermal plasma has been utilized to synthesize size-tunable germanium nanoparticles (Ge NPs). Process pressure and radio-frequency (RF) power were modulated to investigate their effects on the size distribution of the synthesized Ge NPs. The size of the NPs was determined using transmission electron microscope (TEM) images. X-ray diffraction (XRD) analyses and Raman spectroscopy measurements were utilized to confirm the crystallinity of the synthesized Ge NPs. The consistency between the XRD analysis and the diffraction patterns from the TEM analysis indicated that the synthesized the Ge NPs were crystalline. Ge NPs with a mean diameter of less than 10 nm can be synthesized under proper experimental conditions.

• 出版日期2013-12