Note: An improved low-frequency correction technique for piezoelectric force sensors in high-speed nanopositioning systems

作者：Yong Yuen K^*; Fleming Andrew J

来源：Review of Scientific Instruments, 2017, 88(4): 046105.

DOI：10.1063/1.4981530

Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage. Published by AIP Publishing.

• 出版日期2017-4