Hemispherical wineglass resonators fabricated from the microcrystalline diamond

作者：Heidari Amir; Chan Mei Lin; Yang Hsueh An; Jaramillo Gerardo; Taheri Tehrani Parsa; Fonda Peter; Najar Hadi; Yamazaki Kazuo; Lin Liwei; Horsley David A

来源：Journal of Micromechanics and Microengineering, 2013, 23(12): 125016.

DOI：10.1088/0960-1317/23/12/125016

We present the development of millimeter scale 3D hemispherical shell resonators fabricated from the polycrystalline diamond, a material with low thermoelastic damping and very high stiffness. These hemispherical wineglass resonators with 1.1 mm diameter are fabricated through a combination of micro-electro discharge machining (EDM) and silicon micromachining techniques. Using piezoelectric and electrostatic excitation and optical vibration measurement, the elliptical wineglass vibration mode is determined to be at 18.321 kHz, with the two degenerate wineglass modes having a relative frequency mismatch of 0.03%. A study on the effect of the size and misalignment of the anchor and resonator's radius variation on both the average frequency and frequency mismatch of the 2 theta elliptical vibration modes is carried out. It is shown that the absolute frequency of a wineglass resonator will increase with the anchor size. It is also demonstrated that the fourth harmonic of radius variation is linearly related to the frequency mismatch.

• 出版日期2013-12