Analysis of radiative energy loss in a polysilicon CVD reactor using Monte Carlo ray tracing method

作者：Liu, Ying-Wen^*; An, Li-Sha; Wu, Ren-jie

来源：Applied Thermal Engineering, 2016, 93: 269-278.

DOI：10.1016/j.applthermaleng.2015.09.046

• Polysilicon
• CVD reactor
• Monte Carlo ray tracing method
• Radiative energy loss

In this study, the model basing on Monte Carlo ray tracing method is built to analyze the radiative energy loss in the polysilicon CVD reactor. It can be conveniently applied to arbitrary distribution with any number of silicon rods and solve the complex problem of radiative blockage between the rods effectively. The effects of the rod's number, thermal shield and surface emissivity on the radiative energy loss of CVD reactor were investigated in detail. Results show that the average saving energy rate is 39% when the rod number changes from 36 to 72, and it can reach 58% after using thermal shield in 72 rods reactor. Otherwise, results show that the computing time using the Monte Carlo ray tracing method only increased by 66.70% when the number of rod increased from 36 to 72, while the computing counts of cross-string method increased by 711.43%. Therefore, the model based on Monte Carlo ray tracing method is an efficient and fast way to design and optimize any complex CVD reactor in Siemens process and achieve the goal of energy conservation.

• 出版日期2016-1-25
• 单位西安交通大学