科研之友
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摘要
We study errors that occur in geometry and phase reconstruction when using scalar diffraction theory in line gratings with periods below 10 m. The application of those gratings in so-called computer-generated holograms in high-precision interferometric testing of aspheres and free-form surfaces imposes high demands on the generated phase, leading to error budgets in the range of lambda/100. Using rigorous simulations as references, we identify the limits where scalar diffraction theory fails to accurately describe grating geometries and identify the significant error mechanisms.
- 出版日期2014-7-1
