Microstructural changes induced by the pyrolysis step on epitaxial La2Zr2O7 thin films grown by metalorganic decomposition

作者：Roche V; Jimenez C; Chaudouet P; Benaboud R; Weiss F; Sarigiannidou E^*

来源：Thin Solid Films, 2012, 520(7): 2566-2574.

DOI：10.1016/j.tsf.2011.11.011

• Thin films
• Metalorganic deposition
• Annealing
• Transmission electron microscopy
• Lanthanum zirconate oxide
• Texture
• Energy-filtered transmission electron microscopy
• Diffusion barrier

La2Zr2O7 (LZO) thin films are used as buffer layers in second generation high Tc superconductor tapes. The microstructure of LZO films grown by metalorganic decomposition is characterized by the presence of nano-voids throughout the whole thickness of the films. We introduced an out-gassing plateau under vacuum during the pyrolysis process to decrease the size of voids. The temperature of this plateau was determined by Fourier transformed infrared spectroscopy, electron back scattering diffraction and X-Ray diffraction characterizations. The dwelling time was also varied. Transmission Electron Microscopy (TEM) studies revealed that a high heating ramp in combination with a less than an hour pyrolysis plateau decreased pore size. The deposition rate during dip-coating was also decreased to enhance out-gassing at the plateau. Successive LZO layers were deposited and energy filtered TEM images at C K-edge were performed to identify the role of carbon in the nucleation mechanisms.

• 出版日期2012-1-31