科研之友
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摘要
This study examined the degradation of the device performance of InGaZnO4 (IGZO)-based thin-film transistors after annealing at high temperatures in air ambient. Using various characterization methods including scanning electron microscopy, x-ray diffraction, and transmission electron microscopy, we were able to disclose the details of a two-stage phase transformation that led to the device performance degradation. The Mo electrodes first succumbed to oxidation at moderate temperatures (400 similar to 500 degrees C) and then the Mo oxide further reacted with IGZO to produce an In-Mo-O compound with some Ga at higher temperatures (600 similar to 700 degrees C). We analyzed our results based on the thermodynamics and kinetics data available in the literature and confirmed that our findings are in agreement with the experimental results.
- 出版日期2010-2
