摘要

Aluminium (Al) doped Zinc Oxide (ZnO) films were deposited by sol gel spin coating method. Zinc acetate, aluminium nitride, lactic acid and ethanol were used as starting precursors. The films of aluminium doped ZnO were deposited on microscopic glass substrate at various atomic percentage of aluminium to investigate its effect on electrical and optical properties. The sheet resistance was altered with change in aluminium concentration. The minimum sheet resistance of 0.82 Mohm was obtained at 1.41 at% of Al. From the transmittance spectra, it was noticed that the average transmittance was declined for higher values of Al at%. The optical band gap energy was similar to 3.2 eV for undoped ZnO and was found to be shifted to similar to 3.39 eV for the sample having the lowest sheet resistance.

  • 出版日期2008-6