Multi-functional silicone stamps for reactive release agent transfer in UV roll-to-roll nanoimprinting

作者：Dumond J J^*; Low H Y^*; Lee H P; Fuh J Y H

来源：Materials Horizons, 2016, 3(2): 152-160.

DOI：10.1039/c5mh00290g

A study is presented on the transfer of low surface tension reactive monomers such as monomethacryloxypropyl-terminated poly-dimtheylsiloxane (mPDMS) from a host bi-layer hard-PDMS (h-PDMS)/PDMS silicone mold to cured resin coated web surfaces in situ during UV roll-to-roll nanoimprint lithography. Here the bi-layer silicone mold plays a dual role as both a lithographic template as well as a release agent transfer vehicle, accomplishing both tasks without additional in-line processing steps. This paper is thus an early investigation into large area multi-functional silicone stamps designed especially for production of low surface energy polymer resin molds via roll-to-roll processing.

• 出版日期2016-3