Detection of the displacement of Micro touch probes with optical Methods

作者：Dierke Hanno^*; Fischer Marc; Schrader Christian; Nitsche Jan Erik; Abd Elmageed Alaa Eldin; Tutsch Rainer

来源：Technisches Messen, 2014, 81(6): 305-315.

DOI：10.1515/teme-2014-0401

• Touch probe array
• optical detection
• Hartmann-Shack
• wave-front sensor
• deflectometry
• structured
• illumination.

To reduce the effort to detect micromechanical features by touch probe measuring systems, multiple touch probes composed in an array are used to measure some of these structures simultaneously, owing to the arrangement of many similar structures on a wafer. Usually the touch probe signal is read out electronically. In the approaches described here several optical techniques were used to observe the specularly reflective back plane of the touch probe array and to detect the displacement of the touch probes simultaneously. A Hartmann-Shack wave front sensor as well as structured illumination were used. In both cases a deflection of the touch probe leads to a deformation of the reflective back plane of the microprobe array and, thus, a detectable change in the optical signal. Using an image obtained with an undeformed touch probe array as a reference, the displacement of the touch probe can be derived.

• 出版日期2014