A Six-Axis MEMS Force-Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

作者：Beyeler Felix^*; Muntwyler Simon; Nelson Bradley J

来源：Journal of Microelectromechanical Systems, 2009, 18(2): 433-441.

DOI：10.1109/JMEMS.2009.2013387

• Calibration
• force measurement
• microelectromechanical devices
• microsensors
• torque measurement

This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x- y-, and z-axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.

• 出版日期2009-4