科研之友
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摘要
Young's modulus and Poisson's ratio for thin hard films are quite difficult to measure by traditional testing methods. A series of equations for Young's modulus and Poisson's ratio of films are successfully deduced. A novel tensile process is described in this paper. It concludes that this process is relatively easy to perform and allows reliable determination of elastic constants for thin hard films. The magnitude of Young's modulus and Poisson's ratio for electroplating hard alumina film were 106-166 GPa and 0.26-0.27 respectively. Moreover, Young's modulus of film is influenced by the film's thickness and porosity level. The theoretical analysis is logical and reasonable.
- 出版日期2014-8
- 单位岭南师范学院; 西北工业大学; 中国地震局工程力学研究所
