摘要

A temperature sensor with Fabry-Perot cavity formed by dielectric film on the tip of multimode fiber is theoretically simulated and experimentally demonstrated. The sensor is proved to be simple in configuration, low cost and easy for batch fabrication. The thermooptic effect and thermal expansion property of the thin-film materials, and optical coating interference theory were analyzed by MATLAB in the simulation. Experimental result shows that the repeatability error of the fabricated temperature sensor is 6.67%, when the environment tempeiature changes from 200 degrees C to 700 degrees C, and the temperature characteristic of interference fringes is almost the same as in simulation. The simulation analysis can be used to choose thin film materials and coating formula which is sensitive to temperature and robust for tolerance.