Analysis of the convergence rules of full-range PSD surface error of magnetorheological figuring KDP crystal

作者：Chen, Shaoshan^*; He, Deyu; Wu, Yi; Chen, Huangfei; Zhang, Zaijing; Chen, Yunlei

来源：Applied Optics, 2016, 55(28): 8056-8062.

DOI：10.1364/AO.55.008056

A new non-aqueous and abrasive-free magnetorheological finishing (MRF) method is adopted for processing potassium dihydrogen phosphate (KDP) crystal due to its low hardness, high brittleness, temperature sensitivity, and water solubility. This paper researches the convergence rules of the surface error of an initial single-point diamond turning (SPDT)-finished KDP crystal after MRF polishing. Currently, the SPDT process contains spiral cutting and fly cutting. The main difference of these two processes lies in the morphology of intermediate-frequency turning marks on the surface, which affects the convergence rules. The turning marks after spiral cutting are a series of concentric circles, while the turning marks after fly cutting are a series of parallel big arcs. Polishing results indicate that MRF polishing can only improve the low-frequency errors (L > 10 mm) of a spiral-cutting KDP crystal. MRF polishing can improve the full-range surface errors (L > 0.01 mm) of a fly-cutting KDP crystal if the polishing process is not done more than two times for single surface. We can conclude a fly-cutting KDP crystal will meet better optical performance after MRF figuring than a spiral-cutting KDP crystal with similar initial surface performance.

• 出版日期2016-10-1
• 单位中国人民解放军国防科学技术大学