Analysis of dynamic response of plasma polymer film-coated quartz crystal resonator sensor

作者：Takahashi Kazuhiko^*; Iwamuro Yusuke; Sugimoto Iwao

来源：International Journal of Applied Electromagnetics and Mechanics, 2013, 41(1): 39-49.

DOI：10.3233/JAE-121625

• Plasma polymer film
• quartz crystal resonator
• chemical sensor
• diffusion equation
• dynamic model

This paper proposes a mathematical model of a mass-sensitive chemical sensor with a plasma polymer film (PPF)-coated quartz crystal resonator (QCR) that can be used to process signals from gas sensing systems that are operated under ambient conditions. To approximate the responses of the PPF-coated QCR sensor to the sample gas, a mathematical model based on the diffusion equation (assuming the one-dimensional Fickian diffusion of the sample gas molecules into the sensor film) is investigated based on the assumption that the sorption/desorption phenomena occur in the vicinity of the PPF surface. Computational experiments show the feasibility of the proposed mathematical model for estimating the response of the PPF-coated QCR sensor.

• 出版日期2013