科研之友
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摘要
We demonstrate the use of torsion in nanorelays to achieve low voltages, high speeds, single-lithography-step construction, and a form useful for configurability and electronic design enhancements in 3-D integrated implementations. The combined bending and torsion of self-aligned nanopillars facilitates the first top-down fabricated vertical three-terminal nanoscale relay. Experimental devices, even at 500-nm features, operate at similar to 10 V and 1-3 mu s. Scaling to 45 nm suggests operation at approximately 1 V.
- 出版日期2011-3
