Design of rebalance loop for an electrostatically suspended micromachined gyroscope

作者：Han Feng Tian^*; Fu Zhong Ze

来源：Journal of Chinese Inertial Technology, 2010, 18(1): 97-100.

• Angular rate
• Angular rate sensors
• Design and simulation
• Dual axis
• Dual frequency
• Dynamic range
• Electrostatic levitation
• Electrostatic suspension
• Micro-machined gyroscope
• New design
• Position stiffness
• Rebalance loop
• Scale Factor
• Simulation result
• Stability analysis
• Strapdown inertial navigation
• System response
• Ultra high speed

The rotor of an electrostatically suspended micromachined gyroscope is suspended in a vacuum electrode-cavity by controlled electrostatic force and spinning with ultra-high speed. This new design gyroscope can operate as a dual-axis angular rate sensor. In this paper, we present the design and simulation of a rebalance loop for the gyroscope to be used in strapdown inertial navigation application with large dynamic range and high input angular rate. The dynamics of the gyroscope and the scheme to compensate for the unstable position stiffness inherent in electrostatic suspension are derived. Then the stability analysis based on dual-frequency Bode diagram is presented together with system response simulation in order to evaluate the performance of the rebalance loop. The analyzing and simulation results show that the allowable angular rate up to 768 (°)/s and the scale factor of 6.44 mV/((°) &middot s-1) can be reached.

• 出版日期2010
• 单位清华大学