A new evaluation method of surface energy of ultra-thin film

作者:Matsuoka Hiroshige*; Ono Katsunori; Fukui Shigehisa
来源:Microsystem Technologies, 2010, 16(1-2): 73-76.
DOI:10.1007/s00542-008-0762-5

摘要

A new method is proposed for evaluating the dispersive component of the effective surface energy of an ultra-thin film. The dispersive component is obtained by introducing a cut-off distance and integrating the corrected van der Waals pressure equation for a symmetric multilayer system. The cut-off distance is calculated using the experimentally determined surface energy of the substrate without an ultra-thin film. A stearic-acid Langmuir-Blodgett film on a glass plate was used as an ultra-thin film sample on a solid substrate. The dependences of the surface energy on the ultra-thin film thickness were investigated experimentally and theoretically, and the effectiveness of this method is discussed.

  • 出版日期2010-1