Broadband microwave measurement of electron temperature of a large coaxial gridded hollow cathode helium plasma

作者：Gao, Ruilin; Yuan, Chengxun^*; Jia, Jieshu; Zhou, Zhong-Xiang^*; Wang, Ying; Wang, Xiaoou; Li, Hui; Wu, Jian

来源：Physics of Plasmas, 2016, 23(10): 103304.

DOI：10.1063/1.4964916

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This paper reports a new kind of large coaxial gridded hollow cathode discharge at low pressure in a helium atmosphere. A method is presented to determine the electron temperature by measuring the broadband microwave properties; typically, the frequency band extends from 2 to 12GHz. The method involves positioning the discharge device between the two antenna ports to measure the scattering parameter using a network analyzer. For a weak ionized plasma, this method is stable over the entire frequency range. A microwave signal loss of 0.27-37.83 dB was measured within the frequency range. Based on the measured attenuation of the microwaves, the electron temperature was estimated to range from 1.6-4.6 eV under different conditions, which showed good agreements with the results of Langmuir Probe measurements. Published by AIP Publishing.

• 出版日期2016-10
• 单位中国电子科技集团公司第二十二研究所; 哈尔滨工业大学