Design and analysis of an innovative light tracking device based on opto-thermo-electro-mechanical actuators

作者：Mahmoudpour Masihollah^*; Zabihollah Abolghassem; Vesaghi Mohammad; Kolbadinejad Mohadese

来源：Microelectronic Engineering, 2014, 119: 37-43.

DOI：10.1016/j.mee.2014.01.019

• PLZT actuator
• Multi-physics fields
• Finite element
• MEMS
• Light source tracking device

This research presents an application of transparent lanthanum-modified lead zirconate titanate (PLZT) materials in micro light source tracking device, which is designed to function as a result of irradiation, having neither lead wires nor electric circuits. The focus of the paper is on the analytical and finite element investigation into ultraviolet photo-induced multi-physics responses of PLZT photocantilever and a comparison of the measured bending displacement to check the feasibility of these materials in design of micro light source tracking device. The finite element formulation of the transverse deflection for multiphysics analysis of PLZT ceramics by including the photovoltaic and optothermic effects has been discussed. The coupled photo-induced electrical, thermal, and mechanical fields are considered in the formulation. Finally, the transverse displacements of a PLZT photo-cantilever are predicted using the finite element method and compared with the analytical solution for a silicon cantilever beam with a PLZT actuator bonded on the whole top surface of the beam to find the reasonable transverse deflection and slope for optical and light source tracking actuators. A proof-of-the-concept experimental works has been performed and the results obtained are compared with the numerical ones.

• 出版日期2014-5-1