An effective route for the fabrication of rare earth-iron-boron thin films having strong c-axis texture and excellent hard magnetic properties

作者：Tang, S. L.^*; Gibbs, M. R. J.; Davies, H. A.; Liu, Z. W.; Lane, S. C.; Mateen, N. E.

来源：Journal of Applied Physics, 2007, 101(1): 013910.

DOI：10.1063/1.2424539

• PERPENDICULAR ANISOTROPY
• NDFEB
• GROWTH

Rare-earth iron-boron (RE-Fe-B) thin films with a c-axis texture were prepared on a Ta (110) buffer layer on thermally oxidized Si substrates by dc magnetron sputtering. The microstructure, magnetic structure, and magnetic properties of these films were studied as a function of the deposition temperature. The results show that c-axis texture can be obtained over a wide range of deposition temperatures and that the degree of c-axis orientation improves with deposition temperature. It was established that deposition of a RE-Fe-B thin film to obtain grains with a strong c-axis RE2Fe14B texture, coexisting with an amorphous phase, followed by annealing at higher temperature, is an effective route for obtaining excellent hard magnetic properties. Initial results show that a film, which was deposited at 470 degrees C and annealed at 590 degrees C, had a high perpendicular coercivity of 1.8 T, in combination with a large maximum energy product of 238 kJ/m(3).

• 出版日期2007-1-1
• 单位固体微结构物理国家重点实验室; 南京大学