Nanoetching Process on Silicon Solar Cell Wafers During Mass Production for Surface Texture Improvement

作者：Ahn Chisung; Kulkarni Atul; Ha Soohyun; Cho Yujin; Kim Jeongin; Park Heejin; Kim Taesung^*

来源：Journal of Nanoscience and Nanotechnology, 2014, 14(12): 9594-9598.

DOI：10.1166/jnn.2014.10167

• Surface Texture
• Reflectance
• Silicon Solar Cell Wafer
• Wet Etching
• Sonication

Major challenge in nanotechnology is to improve the solar cells efficiency. This can be achieved by controlling the silicon solar cell wafer surface structure. Herein, we report a KOH wet etching process along with an ultrasonic cleaning process to improve the surface texture of silicon solar cell wafers. We evaluated the KOH temperature, concentration, and ultra-sonication time. It was observed that the surface texture of the silicon solar wafer changed from a pyramid shape to a rectangular shape under edge cutting as the concentration of the KOH solution was increased. We controlled the etching time to avoid pattern damage and any further increase of the reflectance. The present study will be helpful for the mass processing of silicon solar cell wafers with improved reflectance.

• 出版日期2014-12