Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths

作者：Bayraktar Muharrem^*; Wessels Werner A; Lee Chris J; van Goor Fred A; Koster Gertjan; Rijnders Guus; Bijkerk Fred

来源：Journal of Physics D: Applied Physics , 2012, 45(49): 494001.

DOI：10.1088/0022-3727/45/49/494001

We propose an active multilayer mirror structure for extreme ultraviolet (EUV) wavelengths, which can be adjusted to compensate for reflectance changes. The multilayer structure tunes the reflectance via an integrated piezoelectric layer that can change its dimension due to an externally applied voltage. Here, we present design and optimization of the mirror structure for maximum reflectance tuning. In addition, we present preliminary results showing that the deposition of piezoelectric thin films with the requisite layer smoothness and crystal structure is possible. Finally piezoelectric coefficient measurement (d(33) = 60 pm V-1) of the film is presented.

• 出版日期2012-12-12