Development of a fast acting vacuum isolation valve for use with ambient ion beam analysis techniques

作者：Antwis L^*; Browton M; Palitsin V

来源：Vacuum, 2014, 99: 26-27.

DOI：10.1016/j.vacuum.2013.04.024

• Vacuum valve
• Vacuum technology
• UHV

The development of an ambient pressure MeV SIMS ion beam analysis capability at the Surrey Ion Beam Centre has necessitated the development of a system to protect the vacuum integrity of the main 2 MV tandem particle accelerator. The development and operating characteristics of a fast acting vacuum isolation valve based on the principle of an induction coil are reported and shown to be suitable for the intended application.

• 出版日期2014-1