High-rate synthesis of Si nanowires using modulated induction thermal plasmas

作者：Ishisaka Yosuke; Kodama Naoto; Kita Kentaro; Tanaka Yasunori^*; Uesugi Yoshihiko; Ishijima Tatsuo; Sueyasu Shiori; Watanabe Shu; Nakamura Keitaro

来源：Applied Physics Express, 2017, 10(9): 096201.

DOI：10.7567/APEX.10.096201

Using 20kW Ar-H-2 pulse-modulated induction thermal plasma (PMITP) with time-controlled feeding of feedstock (TCFF), numerous Si nanowires were synthesized rapidly at 1,000mgh(-1) without the intentional addition of catalysts. The PMITP + TCFF method is our original method for nanomaterial synthesis. The PMITP periodically provides a unique field including higher-temperature plasma during "on-time" and a lower-temperature plasma during "off-time". For rapid and efficient evaporation, metal-grade Si powder feedstock was intermittently injected synchronously into the generated Ar-H-2 PMITP. The synthesized products were analyzed using various analytical techniques. The synthesized products were Si nanowires 10-30 nm in diameter with a SiOx surface layer.

• 出版日期2017-9