科研之友
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摘要
In this paper, a MEMS optical pressure sensor to measure a pressure range of 1 Pa to 10 Pa is designed. Intensity modulation is adopted as the transduction principle for our MEMS device The MEMS pressure sensor is built at the end of the existing optical fiber sensing. The MEMS pressure sensor is fabricated from a Silicon diaphragm bonded over an etched cavity at the end of the optical fiber. Fabrication process flow such as photolithography, deposition and etch are developed. Testing plan such as static and dynamic pressure calibrations is designed to verify the sensor performance..
- 出版日期2012
- 单位河海大学
