科研之友
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摘要
The microstructure, mechanical, and tribological properties of the carbon nitride (CNx) thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CNx films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp(2)C-C, sp(2)C-N, and sp(3)C-N. The TiN inter-layer cause the adhesion of CNx, films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCr15 steel balls, but the wear rates decreased.
