Non-volatile flash memory with discrete bionanodot floating gate assembled by protein template

作者：Miura Atsushi; Tsukamoto Rikako; Yoshii Shigeo; Yamashita Ichiro; Uraoka Yukiharu^*; Fuyuki Takashi

来源：Nanotechnology, 2008, 19(25): 255201.

DOI：10.1088/0957-4484/19/25/255201

We demonstrated non-volatile flash memory fabrication by utilizing uniformly sized cobalt oxide (Co(3)O(4)) bionanodot (Co-BND) architecture assembled by a cage-shaped supramolecular protein template. A fabricated high-density Co-BND array was buried in a metal-oxide-semiconductor field-effect-transistor (MOSFET) structure to use as the charge storage node of a floating nanodot gate memory. We observed a clockwise hysteresis in the drain current-gate voltage characteristics of fabricated BND-embedded MOSFETs. Observed hysteresis obviously indicates a memory operation of Co-BND-embedded MOSFETs due to the charge confinement in the embedded BND and successful functioning of embedded BNDs as the charge storage nodes of the non-volatile flash memory. Fabricated Co-BND-embedded MOSFETs showed good memory properties such as wide memory windows, long charge retention and high tolerance to repeated write/erase operations. A new pathway for device fabrication by utilizing the versatile functionality of biomolecules is presented.

• 出版日期2008-6-25