A Universal Formula for the Secondary Electron Yield of Metals at an Incident Angle of theta

作者：Xie Ai-Gen^*; Zhang Jian; Wang Tie-Bang

来源：Chinese Physics Letters, 2011, 28(9): 097901.

DOI：10.1088/0256-307X/28/9/097901

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Based on the main physical processes, we deduce the relationships among the incident energy W-p0 of the primary electron, the number of released secondary electrons (i.e. delta(PE theta)) per primary electron entering the metal at incident angle theta and the angle theta itself. In addition, the relationship of delta(PE theta) at theta=0 degrees, i.e. delta(PE0), with W-p0 is determined. From the experimental results, the relationship of the ratio at theta=0 degrees, i.e. beta(0) which is the ratio of the average number of released secondary electrons generated by a single primary electron backscattered at the metal surface to that generated by a single primary electron entering the metal, with W-p0 is determined. Moreover, the relationships among the ratio beta(theta), W-p0 and theta are obtained. Based on the relationships among the secondary electron yield at theta (i.e. delta(theta)), the yield at theta = 0 degrees (i.e. delta(0)), the backscattering coefficient at theta (i.e. eta(theta)), the coefficient at theta = 0 degrees (i.e. eta(0)), delta(PE theta) and delta(PE0), we deduce the universal formula for delta(theta), delta(0), eta(theta), eta(0) and W-p0 for the primary electrons at an incident energy of 2-10 keV. The secondary electron yields calculated from the universal formula and the experimental yields of some metals are compared, and the results suggest that the proposed formula is universal for estimation of secondary electron yields at theta = 0 degrees-80 degrees.

• 出版日期2011-9
• 单位南京信息工程大学