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摘要
The nonequilibrium glow discharge in argon mixed with oxygen at atmospheric pressure was generated in a parallel plate reactor with a stepped electrode powered by a 13.56 MHz radio-frequency power supplier. The stepped-electrode reactor consists of a narrow and wide gap structure. A strong electric field occurred at the narrow gap region preionizes Ar/O-2 gas and assists to generate a large volumetric plasma in the wide gap region. Therefore, the stepped-electrode reactor makes it easy to operate Ar/O-2 glow discharge, providing a stable, uniform, and broad plasma jet at atmospheric pressure.
- 出版日期2007-1-29
- 单位大连理工大学
