Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition

作者：Wada Akira^*; Suzuki Tsuneo; Niibe Masahito; Ito Haruhiko; Kanda Kazuhiro

来源：Japanese Journal of Applied Physics, 2011, 50(6): 06GG05.

DOI：10.1143/JJAP.50.06GG05

The effects of thermal annealing of W incorporated diamond-like carbon (W-DLC) films fabricated with focused ion beam chemical vapor deposition (FIB-CVD) were investigated using X-ray absorption fine structure near the carbon K-edge (C-K NEXAFS) and the combination of Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). W-DLC films were annealed for 32 h at temperatures, T-a, between 673 and 1073 K. Comparing the T-a dependences of Ga and H contents obtained from RBS-ERDA and the sp(2)/(sp(2) + sp(3)) ratios from C-K NEXAFS, it was found that even a trace amount of W incorporation into DLC films fabricated by Ga+ FIB-CVD may cause a significant sp(3) -> sp(2) structural change.

• 出版日期2011-6