科研之友
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摘要
A novel set of liquid-phase non-halogenated precursors is presented that yield the chemical vapor deposited parylene polymers. The syntheses of these precursors are simple, scalable, inexpensive and they are easily purified. The parylene polymers deposited from these precursors are compared to the parylene deposited from [2.2] paracylophane, also known as the Gorham process, with little difference.
- 出版日期2011-6
