Micro-manufacturing: research, technology outcomes and development issues

作者：Qin Yi; Brockett A; Ma Y; Razali A; Zhao J^*; Harrison C; Pan W; Dai X; Loziak D

来源：International Journal of Advanced Manufacturing Technology, 2010, 47(9-12): 821-837.

DOI：10.1007/s00170-009-2411-2

• Micro-product
• Micro-manufacturing
• Manufacturing system

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing.

• 出版日期2010-4