A novel patterning technique using super-hydrophobic PTFE thin films by Cat-CVD method

作者：Takachi Michihisa; Yasuoka Hiroaki; Ohdaira Keisuke^*; Shimoda Tatsuya; Matsumura Hideki

来源：Thin Solid Films, 2009, 517(12): 3622-3624.

DOI：10.1016/j.tsf.2009.01.081

• Super-hydrophobic
• Poly-tetrafluoroethylene (PTFE)
• Catalytic chemical vapor deposition (Cat-CVD)
• Metal line patterning
• Functional liquids

Super-hydrophobic poly-tetrafluoroethylene (PTFE) films, with a water contact angle of over 160 degrees, are formed by catalytic chemical vapor deposition (Cat-CVD) under high catalyzer temperature or pressure. Hydrophobicity of the PTFE films is maintained even after annealing up to 300 degrees C. We demonstrate a novel method for forming metal lines using super-hydrophobic PTFE films. Water-based functional liquid containing silver nanoparticles dropped on the patterned PTFE film localizes only on hydrophilic regions, resulting in formation of metal lines after annealing up to 150 degrees C.

• 出版日期2009-4-30