MEMS capacitive accelerometers

作者：Biswas Karabi^*; Sen Siddhartha; Dutta Pranab Kumar

来源：Sensor Letters, 2007, 5(3-4): 471-484.

DOI：10.1166/s1.2007.201

• MEMS capacitive accelerometer
• structural design
• signal conditioning circuit
• fabrication
• noise analysis
• optimization
• simulation tools
• packaging

In the present paper, several aspects of the design of MEMS capacitance accelerometers have been reviewed. In the first part of this review; the mechanical sensing element is considered and detailed survey has been carried out on the different structures, their specifications and the different fabrication technology used by the researchers, the simulation tools used for its modeling and numerical analysis, the work done to optimize the design parameters. The second part is on the signal conditioning circuit. Main emphasis is given on the different design of the circuit, its simulation, fabrication, and integration with the mechanical sensing element. Survey has been also conducted on the packaging issues and noise analysis of the complete accelerometer system.

• 出版日期2007-12