Micro-crystalline diamond and nano-carbon structures produced using a high argon concentration in hot-filament chemical vapor deposition

作者：Baranauskas V^*; Peterlevitz AC; Ceragioli HJ; Durrant SF

来源：Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , 2001, 19(4): 1057-1062.

DOI：10.1116/1.1366701

Micro-crystalline diamond films and nano-carbon structures in the form of wires have been grown by the introduction of argon at very high concentrations (60%-87.5% vol Ar) into the feed mixture (ethanol and hydrogen) of a hot-filament chemical vapor deposition reactor. The argon, in addition to acting as an inert diluent, also modified the kinetics of the carbon deposition process; its presence apparently minimized the deposition of intergranular hydrogenated species, induced an increase in the number of flaws between the diamond grains, increased the porosity of the films, and formed new carbon structures. Well-faceted diamond films, diamond-like carbon (DLC) balls, spongy-like wires, and multilayer structures were observed at different concentrations of Ar. Raman spectroscopy of the deposited material showed that structures of high quality diamond (60%-65% vol Ar) and carbon structures related to DLC, fullerenes and carbon nanotubes, may be deposited by this process.

• 出版日期2001-8