Atomic layer deposition of titanium dioxide nanostructures using carbon nanosheets as a template

作者：Rooth Marten; Quinlan Ronald A; Widenkvist Erika; Lu Jun; Grennberg Helena; Holloway Brian C; Harsta Anders^*; Jansson Ulf

来源：Journal of Crystal Growth, 2009, 311(2): 373-377.

DOI：10.1016/j.jcrysgro.2008.10.035

• Nucleation
• Atomic layer epitaxy
• Nanomaterials
• Oxides

Nanostructured films of anatase TiO2 is deposited on carbon nanosheet (CNS) templates using atomic layer deposition (ALD). The high-surface area of the CNS together with the unique step coverage of the ALD process makes it possible to obtain sheet-like TiO2 nanostructures, for use in potential applications, e.g. photocatalysis and photovoltaics. A problem with ALD on CNS was the low nucleation rate giving TiO2 films with pinholes. It is shown that introduction of defects by an acid-treatment process can be used to control initial nucleation and growth of the films. The TiO2 on the defect-rich CNS nucleates faster and results in a film with no observable pinholes consisting of crystalline grains in an amorphous matrix.

• 出版日期2009-1-1