Abundance of field-ionized ion species and current stability of ion beam emitted in He-Ne gas mixture

作者：Komaki Keisuke^*; Nagai Shigekazu; Iwata Tatsuo; Kajiwara Kazuo; Hata Koichi

来源：Surface and Interface Analysis, 2016, 48(11): 1139-1143.

DOI：10.1002/sia.6091

• gas field ion source
• field ionization
• time-of-flight mass spectrometry
• field adsorption

An attempt to increase the He ion current of a gas field ion source is made using a He-Ne mixture. The abundance of each ion in the produced ion beam is examined as a function of the applied field, along with the composition of the supplied gas mixture, using a field ion microscope equipped with a time-of-flight mass spectrometer. The operating conditions under which the He ion current is enhanced and no Ne ions are detected are confirmed. For the conditions under which He and Ne ions are detected simultaneously, a spike-like current change showing the positive correlation between each ion current is observed.

• 出版日期2016-11