摘要

The problem of applying sensitivity analysis to a one-dimensional atmospheric radio frequency plasma discharge simulation is considered. A fluid simulation is used to model an atmospheric pressure radio frequency helium discharge with a small nitrogen impurity Sensitivity derivatives are computed for the peak electron density with respect to physical inputs to the simulation. These derivatives are verified using several different methods to compute sensitivity derivatives It is then demonstrated how sensitivity derivatives can be used within a design cycle to change these physical Inputs so as to Increase the peak electron density It is also shown how sensitivity analysis can be used in conjunction with experimental data to obtain better estimates for rate and transport parameters.

  • 出版日期2010-8-20