A simple roll measurement method based on a rectangular-prism

作者:Zhai, Yusheng; Feng, Qibo*; Zhang, Bin
来源:Optics and Laser Technology, 2012, 44(4): 839-843.
DOI:10.1016/j.optlastec.2011.11.021

摘要

A novel roll measurement method based on a rectangular-prism is presented. A collimated beam is normally incident upon a rectangular-prism with splitting film, and it is divided into two parts, the reflected and the transmitted beams. The displacements of the reflected and the transmitted beams are measured by two quadrant photoelectric detectors QD(1) and QD(2), respectively. The displacement change in they-axis caused by roll can be measured with differential measurements from two quadrant photoelectric detectors. Theoretic analyses show that the crosstalk of straightness errors and yaw errors are avoided, and the crosstalk of the pitch alpha can be neglected by adopting differential measurements because the direction changes of the reflected and the transmitted beams are both double the changes of pitch. In this way, the stability for the roll measurement can be greatly enhanced. The systemic model is established and the feasibility of such a system is verified by theoretical analysis and experiments. The resolution of 0.3 '' and measurement accuracy of 2 '' can be obtained by the set-up measurement system.