摘要

In this study, a rotary inchworm piezoelectric motor is proposed. The operating principle of the proposed motor and its clamping mechanisms are discussed. Moreover, we also establish the dynamic equation of the clamping mechanisms. From the established equations, the natural frequencies and modal functions are obtained. The sensitivities of the configuration parameter to natural frequencies of the clamping mechanisms are investigated. Finally, the tests on the relative errors of the natural frequencies between the theoretical and experimented results are performed to verity the correctness of the theoretical analysis.