Numerical correction of measurement errors of the homodyne laser interferometer

作者：Dobosz Marek^*; Czapski Maciej; Zamiela Grzegorz

来源：Przeglad Elektrotechniczny, 2012, 88(10A): 121-126.

• distance measuring interferometer
• quadrature signals
• interferometer measurement errors
• numerical correction

Theoretical basis of homodyne interferometer measuring reflector displacement evaluation are presented. Particular attention has been paid to measurement errors caused by possible distortions of measuring signals. Algorithm of numerical correction of the measuring signals distortions has been proposed and experimentally verified.(Numerical correction of measurement errors of the homodyne laser interferometer)

• 出版日期2012