Automated Resonance Matching for CMOS MEMS Micro-Resonators

作者：Liao Yi Kai; Chiang Che Hao; Lu Michael S C^*

来源：IEEE Sensors Journal, 2016, 16(21): 7685-7692.

DOI：10.1109/JSEN.2016.2605663

• CMOS
• MEMS
• capacitive oscillator
• resonance matching

This paper reports the design and characterization of a phase-locked loop-based control scheme implemented in a complementary metal-oxide-semiconductor process for resonance matching between capacitive micro-resonators. The system-on-chip implementation can be utilized for calibrating individual resonance in a large sensor array or matching the drive and sense modes for micromachined vibratory gyroscopes. The target micro-resonator acts as a voltage-controlled oscillator in the control loop with the resonance being adjusted by the electrostatic spring-softening effect. Sinusoidal test inputs applied to the control loop are shown to provide better resonance matching than square-wave inputs. This paper successfully demonstrates automated matching by pulling the resonance of a target micro-resonator within 2.4 x 10(-2) % of the reference resonance under atmospheric pressure.

• 出版日期2016-11-1
• 单位中国科学院电工研究所; 清华大学